1. The structural form of vacuum pipes, static sealing parts (flange, sealing ring, etc.) in the equipment shall comply with the provisions of GB/T6070.

2. Vacuum measuring pipe shall be installed on the low vacuum and high vacuum pipes and on the vacuum coating chamber to measure the vacuum degree of each part respectively.When the electric field is found to interfere with the measurement, the electric field shielding device shall be installed at the measuring port.

3. If the main pump used by the equipment is a diffusion pump, a trap trap shall be installed on the side of the air inlet of the pump.

4. The coating room of the equipment shall be provided with an observation window and a baffle device.The observation window shall be able to observe the operation of the deposition sources and other key parts.

5. The design of the ion plating deposition source should improve the dissociation rate in the coating process as far as possible, improve the utilization rate of the coating material, reasonably match the power of the deposition source, and reasonably arrange the position of the deposition source in the vacuum chamber.

6. Reasonable arrangement of the heating device, the general heater structure layout should make the coated workpiece temperature rise uniform.

7. The workpiece frame shall be insulated from the vacuum chamber body and the workpiece frame shall be designed to uniform the workpiece film layer

8. Ion coating equipment should generally have workpiece negative bias and ion bombardment power supply, ion bombardment power supply should have inhibitory abnormal discharge device to maintain working stability

9. The insulation resistance of the vacuum chamber is 4.4.6 in GB/T11164-1999

10. Other attention matters:  

1) Ambient temperature:10-30oC

2) Relative humidity: not greater than 75%

3) Inlet water temperature of cooling water: not higher than 25oC

4) Cooling water quality: urban tap water or comparable quality water

5) Power supply: 380V three-phase 50Hz or 220V single-phase 50Hz (required by the electrical appliances used); voltage fluctuation range: 342-399V or 198-231V; frequency fluctuation range: 49-51Hz.

6) The pressure, temperature and consumption of compressed air, liquid nitrogen, cold water and hot water required by the equipment shall be specified in the product operation instructions.

The surrounding environment of the equipment is clean and the air is clean, and there should be no dust or gas that causes the surface corrosion of electrical appliances and other metal parts or causes the conductive electricity between the metals.